Fault Detection & Classification : Maestria

Maestria® is a scalable Fault Detection and Classification (FDC) software solution to control semiconductor manufacturing equipment and processes. Maestria® allows manufacturers to accurately detect and identify process or tool problems arising during production in real-time, thus achieving faster product ramps and higher yields.

Maestria® provides capabilities and methodologies for data collection, data monitoring and consolidation, univariate SPC, unique Multivariate Analysis and Classification functions, and automatic notification of FDC alarms. Maestria® addresses all tool types including metrology. The solution is suitable both for 200 mm and 300 mm manufacturing environments.

Generic and reliable Data Collection: suitable for any process / manufacturing or metrology equipment and sensor integration with embedded data quality assessment tool (DCQV)

Powerful data consolidation functionalities: includes an Equation Editor software development kit to build your own golden indicators and your library of algorithms

Comprehensive analysis capabilities: on-line and off-line univariate SPC and multivariate analysis, chamber and equipment matching functionality

Fast diagnostic: Maestria’s unique classification feature associates a signature to every fault detected with Multivariate analysis and classifies them by anomaly groups

Fab proven: easy integration to existing IT architecture and fab information system, automatic triggering and notification of FDC alarms, fab-wide supervision web service

Maestria® has been adopted by major semiconductor manufacturers in Asia, in Europe and in the US and features the largest installed based in 300mm fabs and 200mm facilities.

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